ECCN 3E993

RSAT

Technology for the development or production of commodities specified in 3B993; and technology as follows .

Category: 3 - ElectronicsProduct Group: E - TechnologyLast Updated: 2026-04-10

Items Covered

  • a."Technology" specially designed for the "development" or "production" of commodities specified by 3B993.
  • b."Technology" designed or modified to increase the number of wafers processed per hour, averaged over any time interval, by greater than 1%, of equipment specified in 3B001.f.1 or 3B993.f.1.
  • c."Technology" not specified by 3E993.a designed or modified to perform all of the following in or with deep-ultraviolet immersion photolithography equipment:
  • 1. Decrease the minimum resolvable feature specified by 3B993.f.1.b.1; and
  • 2. Decrease the maximum 'dedicated chuck overlay' of a deep-ultraviolet immersion lithography equipment above 1.5 nm and below or equal to 2.4 nm.

Control Reasons

RSRegional Stability

Items controlled for regional stability reasons.

Column 1: YesColumn 2: No
ATAnti-Terrorism

Items controlled for anti-terrorism reasons. Most items on the CCL have AT controls.

Column 1: YesColumn 2: No

Disclaimer

This information is for reference only. For official classifications, consult BIS or a qualified export control professional.

Official Reference

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