ECCN 3D003

NSAT

'Computational lithography' software specially designed for the development of patterns on EUV-lithography masks or reticles.

Category: 3 - ElectronicsProduct Group: D - SoftwareLast Updated: 2026-04-10

What This ECCN Covers

ECCN 3D003 controls "computational lithography" software specially designed for the development or production of items tied to advanced semiconductor manufacturing, as defined in the entry. This design-side software (e.g., for resolution enhancement and mask synthesis) is controlled for National Security and Anti-Terrorism reasons.

Who needs to check this?

EDA and lithography-software vendors providing computational-lithography, OPC, or mask-synthesis tools for advanced chip production.

Compliance tip

Identify the exact capability the entry controls — computational-lithography software is a focused, evolving control area tied to leading-edge fabrication. Verify the §734.7 "published" exclusion for any publicly available code, and treat advanced-node uses with heightened §744.23 diligence.

Reviewed by Jack Tan · Last reviewed: Jun 5, 2026

Control Reasons

NSNational Security

Items controlled for national security reasons under multilateral export control regimes.

Column 1: YesColumn 2: No
ATAnti-Terrorism

Items controlled for anti-terrorism reasons. Most items on the CCL have AT controls.

Column 1: YesColumn 2: No

Disclaimer

This information is for reference only. For official classifications, consult BIS or a qualified export control professional.

Official Reference