ECCN 3C992

AT

Positive resists designed for semiconductor lithography specially adjusted (optimized) for use at wavelengths between 370 and 193 nm.

Category: 3 - ElectronicsProduct Group: C - MaterialsLast Updated: 2026-04-10

What This ECCN Covers

ECCN 3C992 covers positive resists designed for semiconductor lithography specially adjusted (optimized) for use at the wavelengths in the entry — the Anti-Terrorism companion for certain photoresists. As an AT-only entry, it applies to a limited set of destinations.

Who needs to check this?

Photoresist and electronic-materials suppliers serving semiconductor lithography.

Compliance tip

Confirm the resist is optimized for the specified exposure wavelengths. AT-only control means a license is needed only to a limited destination list; verify the Country Chart and screen all parties against the Entity and SDN lists.

Reviewed by Jack Tan · Last reviewed: Jun 5, 2026

Control Reasons

ATAnti-Terrorism

Items controlled for anti-terrorism reasons. Most items on the CCL have AT controls.

Column 1: YesColumn 2: No

Disclaimer

This information is for reference only. For official classifications, consult BIS or a qualified export control professional.

Official Reference