ECCN 3B994

RSAT

Semiconductor manufacturing equipment that enables advanced-node integrated circuit production, as follows (see list of items controls), and specially designed components and accessories therefor.

Category: 3 - ElectronicsProduct Group: B - Test EquipmentLast Updated: 2026-04-10

What This ECCN Covers

ECCN 3B994 controls semiconductor manufacturing equipment that enables "advanced-node integrated circuit" production, as defined in the entry. It is part of the layered U.S. controls on leading-edge chipmaking capability and is controlled for Regional Stability and Anti-Terrorism reasons.

Who needs to check this?

Semiconductor capital-equipment makers and fab integrators whose tools contribute to advanced-node fabrication.

Compliance tip

3B994 works alongside 3B001, 3B993, and the §744.23 end-use controls — the definition of "advanced-node" and the associated country rules evolve, so check the current entry and latest BIS guidance. Treat tools tied to advanced-node or restricted-destination fabs as license-required pending review.

Reviewed by Jack Tan · Last reviewed: Jun 5, 2026

Items Covered

b.Semiconductor wafer fabrication equipment designed for ion implantation of 300mm wafers as follows:
2. Ion implantation equipment as follows:
2.a. Having all of the following:
2.a.1. Beam current greater than 1uA and less than 5mA; and
2.a.2. Beam energy greater than 5 keV and less than 300 keV; or
2.b. Having all of the following:
2.b.1. Beam current greater than 5 mA; and
2.b.2. Beam energy less than 5 keV; or
2.c. Having angular accuracy equal to or less (better) than 0.1 degrees.
q.Inspection and metrology equipment as follows:
3. Optical thin film metrology equipment or optical critical dimension metrology equipment designed for 300mm wafers and containing software designed for measuring non-planar transistors.

4 items reserved by BIS (not shown)

Control Reasons

RSRegional Stability

Items controlled for regional stability reasons.

Column 1: YesColumn 2: No

ATAnti-Terrorism

Items controlled for anti-terrorism reasons. Most items on the CCL have AT controls.

Column 1: YesColumn 2: No

Disclaimer

This information is for reference only. For official classifications, consult BIS or a qualified export control professional.